|
| Model | : HG200 Series |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 50,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR®, 92mm IGS(c-seal/w-seal) |
| Communication | : Analog/Digital/Devicenet |
| Seal | : Metal |
|
|
| Model | : FC-PAR78X Series |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 200,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR®, 1.5”/1.125” IGS(c-seal/w-seal) |
| Communication | : Analog/RS485/Devicenet |
| Seal | : Metal |
|
|
| Model | : FC-DR98X Series |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 50,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR®, 1.5”/1.125” IGS(c-seal/w-seal |
| Communication | : Analog/RS485/Devicenet |
| Seal | : Metal |
|
|
| Model | : FC-PAR78XCHT |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 50,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR Male , Block type |
| Communication | : Analog/Digital/Devicenet |
| Seal | : Metal |
|
|
| Model | : FC-R77X Series |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 200,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR®, 1/4" VCO®, 1/4" Swagelok® |
| Communication | : Analog |
| Seal | : Viton |
|
|
| Model | : FC-R78X Series |
| Maker | : Hitachi Metal / Aera |
| Range | : 10 SCCM – 200,000 SCCM (N2 equivalent) |
| Fitting | : 1/4" VCR®, 1/4" Swagelok® |
| Communication | : Analog |
| Seal | : Metal |
|
|
| Model | : EPV100-AW |
| Maker | : Hitachi Metal / Aera |
| Range | : 800 to 1100hPa |
| Fitting | : |
| Communication | : Analog |
| Seal | : Viton |
|
> 제품소개 > MFC/EPV
