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MFC/EPV 목록

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MFC/EPV 목록
Model Specification
Model: HG200 Series
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR®, 92mm IGS(c-seal/w-seal)
Communication: Analog/Digital/Devicenet
Seal : Metal
Model: FC-PAR78X Series
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR®, 1.5”/1.125” IGS(c-seal/w-seal)
Communication: Analog/RS485/Devicenet
Seal : Metal
Model: FC-DR98X Series
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR®, 1.5”/1.125” IGS(c-seal/w-seal
Communication: Analog/RS485/Devicenet
Seal : Metal
Model: FC-PAR78XCHT
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR Male , Block type
Communication: Analog/Digital/Devicenet
Seal : Metal
Model: FC-R77X Series
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR®, 1/4" VCO®, 1/4" Swagelok®
Communication: Analog
Seal : Viton
Model: FC-R78X Series
Maker: Hitachi Metal / Aera
Range: 10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting: 1/4" VCR®, 1/4" Swagelok®
Communication: Analog
Seal : Metal
Model: EPV100-AW
Maker: Hitachi Metal / Aera
Range: 800 to 1100hPa
Fitting
Communication: Analog
Seal : Viton

 


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