MPC/EPV 1 페이지 | 에이텍솔루션

Product

MFC/EPV
UE
Wafer Reclaim
QuartzClean

MPC/EPV

We will become a trusted partner that offers the best quality to customers.

7

EPV100-AW

Maker	Hitachi Metal / Aera
Range	800 to 1100hPa
Fitting	''
Communication	Analog
Seal	Viton

6

FC-R78X Series

Maker	Hitachi Metal / Aera
Range	10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog
Seal	Metal

5

FC-R77X Series

Maker	Hitachi Metal / Aera
Range	10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog
Seal	Viton

4

FC-PAR78XCHT

Maker	Hitachi Metal / Aera
Range	10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog/Digital/Devicenet
Seal	Metal

3

FC-DR98X Series

Maker	Hitachi Metal / Aera
Range	10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog/RS485/Devicenet
Seal	Metal

2

HG200 Series

Maker	Hitachi Metal / Aera
Range	10 SCCM – 50,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog/Digital/Devicenet
Seal	Metal

1

FC-PAR78X Series

Maker	Hitachi Metal / Aera
Range	10 SCCM – 200,000 SCCM (N2 equivalent)
Fitting	1/4
Communication	Analog/RS485/Devicenet
Seal	Metal